The restrictions relate primarily to the supply of equipment to China and are intended to limit ASML’s ability to provide lithographic scanners that allow 5-nm chip production. Under US law, authorities can control the transfer of technology and equipment between third countries if they contain items or software originating in the US.
Accordingly, ASML lithography equipment supplied to China is subject to this regulation. The new measures will require separate permits for maintenance and repair, and this could affect the same Chinese companies affected by restrictions on imports of ASML equipment.
Source: Ferra
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